High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

标题
High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 10, Pages 5537-5541
出版商
Elsevier BV
发表日期
2008-08-13
DOI
10.1016/j.apsusc.2008.07.201

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