期刊
APPLIED SURFACE SCIENCE
卷 255, 期 24, 页码 9758-9760出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2009.04.065
关键词
Femtosecond laser-assisted etching; Selective etching; Pyrex glass; Potassium hydroxide (KOH)
类别
资金
- Grants-in-Aid for Scientific Research [20360115] Funding Source: KAKEN
A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated. (C) 2009 Elsevier B.V. All rights reserved.
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