期刊
APPLIED SURFACE SCIENCE
卷 255, 期 16, 页码 7268-7272出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2009.03.080
关键词
AZO film; NH4Cl aqueous solution; Surface texture; Magnetron sputtering
类别
资金
- National Natural Science Foundation of China [60807001]
- National Basic Research Program of China [2006CB202601]
Effect of 5.0% diluted NH4Cl aqueous solution was comparably investigated on the postdeposition surface texture of the as-deposited smooth aluminum-doped zinc oxide (AZO) films by direct current pulse reactive magnetron sputtering (DCP-sputtering) and direct current reactive magnetron sputtering (DC-sputtering). The as-deposited AZO films by DCP-sputtering showed an effective surface texture for light trapping upon the etching of 5.0% diluted NH4Cl solution, while the as-deposited AZO films by DC-sputtering demonstrated an obscure surface texture upon the same etching treatment. The different result might be attributable to a big difference in film strain and film compactness. The formation of interstitial Zn, interstitial Al and grain boundary is the key to realize effective surface texture for the as-deposited AZO films. (C) 2009 Elsevier B. V. All rights reserved.
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