Effect of deposition temperature on boron-doped carbon coatings deposited from a BCl3–C3H6–H2 mixture using low pressure chemical vapor deposition

标题
Effect of deposition temperature on boron-doped carbon coatings deposited from a BCl3–C3H6–H2 mixture using low pressure chemical vapor deposition
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 21, Pages 8761-8768
出版商
Elsevier BV
发表日期
2009-06-14
DOI
10.1016/j.apsusc.2009.06.030

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