Structural properties of Al2O3 dielectrics grown on TiN metal substrates by atomic layer deposition

标题
Structural properties of Al2O3 dielectrics grown on TiN metal substrates by atomic layer deposition
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 6, Pages 3769-3772
出版商
Elsevier BV
发表日期
2008-11-29
DOI
10.1016/j.apsusc.2008.10.048

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