Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 256, Issue 3, Pages 819-822

出版商

Elsevier BV

发表日期

2009-08-26

DOI

10.1016/j.apsusc.2009.08.067

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