Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography

标题
Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 5, Pages 2885-2889
出版商
Elsevier BV
发表日期
2008-09-08
DOI
10.1016/j.apsusc.2008.08.045

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