Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography

标题
Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 254, Issue 13, Pages 3758-3761
出版商
Elsevier BV
发表日期
2007-12-04
DOI
10.1016/j.apsusc.2007.11.053

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