Anti-sticking treatment for a nanoimprint stamp

标题
Anti-sticking treatment for a nanoimprint stamp
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 254, Issue 10, Pages 2955-2959
出版商
Elsevier BV
发表日期
2007-10-25
DOI
10.1016/j.apsusc.2007.10.047

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