High quality SiC microdisk resonators fabricated from monolithic epilayer wafers

标题
High quality SiC microdisk resonators fabricated from monolithic epilayer wafers
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 104, Issue 5, Pages 051109
出版商
AIP Publishing
发表日期
2014-02-05
DOI
10.1063/1.4863932

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