Morphology of oxygen precipitates in silicon wafers pre-treated by rapid thermal annealing

标题
Morphology of oxygen precipitates in silicon wafers pre-treated by rapid thermal annealing
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 104, Issue 18, Pages 182101
出版商
AIP Publishing
发表日期
2014-05-06
DOI
10.1063/1.4875278

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