Imaging of buried phosphorus nanostructures in silicon using scanning tunneling microscopy

标题
Imaging of buried phosphorus nanostructures in silicon using scanning tunneling microscopy
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 104, Issue 25, Pages 253102
出版商
AIP Publishing
发表日期
2014-06-24
DOI
10.1063/1.4884654

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