In situ electron-beam lithography of deterministic single-quantum-dot mesa-structures using low-temperature cathodoluminescence spectroscopy

标题
In situ electron-beam lithography of deterministic single-quantum-dot mesa-structures using low-temperature cathodoluminescence spectroscopy
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 25, Pages 251113
出版商
AIP Publishing
发表日期
2013-06-28
DOI
10.1063/1.4812343

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