Room temperature molecular resolution nanopatterning of cyclopentene monolayers on Si(100) via feedback controlled lithography

标题
Room temperature molecular resolution nanopatterning of cyclopentene monolayers on Si(100) via feedback controlled lithography
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 24, Pages 243106
出版商
AIP Publishing
发表日期
2013-06-19
DOI
10.1063/1.4811562

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