AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q similar to 10(4) has been found at 6-7 GHz band. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798333]