期刊
APPLIED PHYSICS LETTERS
卷 103, 期 15, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4824976
关键词
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资金
- National Natural Science Foundation of China [11222220, 90816007, 91116006, 10902059, 11320101001]
- Tsinghua University Initiative Scientific Research Program [2011Z02173]
Kinetically controlled transfer printing based on rate-dependent adhesion is widely used to heterogeneously integrate micro/nano-devices. Through analysis of peeling stamps with grating-like micropatterns from the rigid substrate in different directions, the directionally dependent adhesion strength is investigated in detail. Experiments of peel test and picking up silicon ribbons from silicon-on-insulator wafer were conducted and consistent with the analytical prediction. The method and analytical results proposed in this Letter can guide the design of the micropatterns on stamp to realize a more effective transfer printing approach. (C) 2013 AIP Publishing LLC.
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