Temperature control in thermal microactuators with applications to in-situ nanomechanical testing

标题
Temperature control in thermal microactuators with applications to in-situ nanomechanical testing
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 1, Pages 013101
出版商
AIP Publishing
发表日期
2013-01-03
DOI
10.1063/1.4773359

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