Enhancement of the maximum energy density in atomic layer deposited oxide based thin film capacitors

标题
Enhancement of the maximum energy density in atomic layer deposited oxide based thin film capacitors
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 103, Issue 4, Pages 042907
出版商
AIP Publishing
发表日期
2013-07-26
DOI
10.1063/1.4816339

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