Al-doped ZnO thin-film transistor embedded micro-cantilever as a piezoresistive sensor

标题
Al-doped ZnO thin-film transistor embedded micro-cantilever as a piezoresistive sensor
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 6, Pages 064101
出版商
AIP Publishing
发表日期
2013-02-12
DOI
10.1063/1.4792062

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