Integrated high frequency aluminum nitride optomechanical resonators

High-Q aluminum nitride photonic crystal nanobeam cavities

(2012) W. H. P. Pernice et al.   APPLIED PHYSICS LETTERS

GHz optomechanical resonators with high mechanical Q factor in air

(2011) Xiankai Sun et al.   OPTICS EXPRESS

A monolithic radiation-pressure driven, low phase noise silicon nitride opto-mechanical oscillator

(2011) Siddharth Tallur et al.   OPTICS EXPRESS

Temperature-compensated aluminum nitride lamb wave resonators

(2010) Chih-ming Lin et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Super-high-frequency two-port AlN contour-mode resonators for RF applications

(2010) M. Rinaldi et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

(2009) R. B. Karabalin et al.   APPLIED PHYSICS LETTERS

Optomechanical crystals

(2009) Matt Eichenfield et al.   NATURE

Broadband all-photonic transduction of nanocantilevers

(2009) Mo Li et al.   Nature Nanotechnology

1.52-GHz micromechanical extensional wine-glass mode ring resonators

(2008) Yuan Xie et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL