Cation stoichiometry optimization of SrTiO3 (110) thin films with atomic precision in homogeneous molecular beam epitaxy

We study the evolution of surface reconstructions on SrTiO3 (110) determined by cation concentration ratio and find it detectable by high energy electron diffraction (RHEED) even at high temperature up to 800 degrees C. The evaporation rate of Sr and Ti sources can be calibrated precisely by monitoring RHEED patterns in situ and in real time during the extended homogeneous oxide molecule beam epitaxy growth of SrTiO3 (110) film. High quality film is obtained with deviation of cation stoichiometry less than 0.5%. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3681796]