期刊
APPLIED PHYSICS LETTERS
卷 101, 期 14, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4756904
关键词
-
资金
- Engineering and Physical Sciences Research Council UK [EP/H049037/1, EP/E055818/1]
- EPSRC [EP/E055818/1, EP/H049037/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/H049037/1, EP/E055818/1] Funding Source: researchfish
A liquid crystal spatial light modulator (SLM) is used to control the focal symmetry and the associated directional quill effect encountered when using a femtosecond laser for direct laser writing of fused silica. Applying a blazed grating to the SLM effectively introduces pulse front tilt to the fabrication beam and a spatiotemporal asymmetry at the focus. As a result different fabricated features are generated when moving the substrate in opposite directions relative to the tilt. It is additionally shown that inhomogeneous pupil illumination can cause similar directionality in the fabrication via a spatial asymmetry in the focus. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4756904]
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据