Modulation of strain, resistance, and capacitance of tantalum oxide film by converse piezoelectric effect

We deposited tantalum oxide film on a laminate structure composed of a Si substrate and a piezoelectric 0.72Pb(Mg1/3Nb2/3)O-3-0.28PbTiO(3) single crystal and achieved in situ modulation of the resistance and capacitance of the Ta2O5 film. The modulation arises from the induced lattice strain in the Ta2O5 film, which is induced by the electric-field-induced strain in the piezoelectric crystal. Under an external electric field of similar to 2 kV/cm, the longitudinal gauge factor of the Ta2O5 film is similar to 3300. The control of the strain using the converse piezoelectric effect may be further extended to tune the intrinsic strain of other oxide thin films. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3609012]