Fracture toughness, hardness, and Young’s modulus of tantalum nanocrystalline films

标题
Fracture toughness, hardness, and Young’s modulus of tantalum nanocrystalline films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 97, Issue 14, Pages 143115
出版商
AIP Publishing
发表日期
2010-10-08
DOI
10.1063/1.3496000

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