期刊
APPLIED PHYSICS LETTERS
卷 96, 期 14, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3374885
关键词
atomic force microscopy; carbon; nanolithography; nanopatterning; photoelectron spectra
资金
- Ministerio de Ciencia, Investigacion e Innovacion [MAT2009-08650, CTQ2007-31076-E, MAT2008-06765]
We report a tip-based nanofabrication method to generate carbon nanopatterns. The process uses the field-induced transformation of carbon dioxide gas into a solid material. It requires the application of low-to-moderate voltages similar to 10-40 V. The method allow us to fabricated sub-25 nm dots and it can be up scaled to pattern square centimeter areas. Photoemission spectroscopy shows that the carbon is the dominating atomic species of the fabricated structures. The formation of carbon nanostructures and oxides by atomic force microscope nanolithography expands its potential by providing patterns on the same sample with different chemical composition.
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