Effects of vacuum ultraviolet and ultraviolet irradiation on ultrathin hafnium-oxide dielectric layers on (100)Si as measured with electron-spin resonance

标题
Effects of vacuum ultraviolet and ultraviolet irradiation on ultrathin hafnium-oxide dielectric layers on (100)Si as measured with electron-spin resonance
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 96, Issue 19, Pages 192904
出版商
AIP Publishing
发表日期
2010-05-15
DOI
10.1063/1.3430570

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