Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements

标题
Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 95, Issue 5, Pages 052110
出版商
AIP Publishing
发表日期
2009-08-10
DOI
10.1063/1.3202418

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