Monolithic integration of quantum dot containing microdisk microcavities coupled to air-suspended waveguides

GaAs microdisk microcavities coupled to monolithic air-suspended waveguide structures are fabricated with out-of-plane light coupling achieved via the grating couplers monolithically integrated in the input and output ports. Photoluminescence signal of the whispering gallery modes is extracted from the grating couplers through the waveguide. Quality factors of modes are obtained through a transmission measurement with quality factors of up to 9500 and transmission depth of Delta T=35%.