Growth of high quality N-polar AlN(0001¯) on Si(111) by plasma assisted molecular beam epitaxy

标题
Growth of high quality N-polar AlN(0001¯) on Si(111) by plasma assisted molecular beam epitaxy
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 94, Issue 15, Pages 151906
出版商
AIP Publishing
发表日期
2009-04-15
DOI
10.1063/1.3118593

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