期刊
APPLIED PHYSICS LETTERS
卷 94, 期 16, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3122933
关键词
Boltzmann equation; cantilevers; damping; elemental semiconductors; Knudsen flow; microfluidics; microsensors; silicon; slip flow
资金
- Department of Energy [National Nuclear Security Administration] [DE-FC52-08NA28617, DE-AC04-94-AL85000]
- SNL [623235]
Predicting the gas damping of microcantilevers oscillating in different vibration modes in unbounded gas at low pressures is relevant for increasing the sensitivity of microcantilever-based sensors. While existing free-molecular theories are valid only at very high Knudsen numbers, continuum models are valid only at very low Knudsen numbers. We solve the quasisteady Boltzmann equation and compute a closed-form fit for gas damping of rectangular microcantilevers that is valid over four orders of magnitude of Knudsen numbers spanning the free-molecular, the transition, and the low pressure slip flow regimes. Experiments are performed using silicon microcantilevers under controlled pressures to validate the theory.
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