4.6 Article

Surface stress-induced change in overall elastic behavior and self-bending of ultrathin cantilever plates

期刊

APPLIED PHYSICS LETTERS
卷 94, 期 23, 页码 -

出版社

AMER INST PHYSICS
DOI: 10.1063/1.3153158

关键词

adsorption; bending strength; cantilevers; elasticity; plates (structures); stress effects; surface reconstruction

资金

  1. Dutch national research program on micro technology

向作者/读者索取更多资源

In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molecular adsorption, there exists a surface stress and a surface elasticity imbalance between top and bottom surface of the cantilever. The surface elasticity imbalance creates an extra bending-extensional coupling which has not been taken into account previously. This leads to a modified extensional stiffness, bending stiffness and bending-extensional coupling stiffness. Due to the surface stress imbalance, an extended Stoney's formula for self-bending of ultrathin cantilevers is derived.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据