期刊
APPLIED PHYSICS LETTERS
卷 94, 期 23, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3153158
关键词
adsorption; bending strength; cantilevers; elasticity; plates (structures); stress effects; surface reconstruction
资金
- Dutch national research program on micro technology
In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molecular adsorption, there exists a surface stress and a surface elasticity imbalance between top and bottom surface of the cantilever. The surface elasticity imbalance creates an extra bending-extensional coupling which has not been taken into account previously. This leads to a modified extensional stiffness, bending stiffness and bending-extensional coupling stiffness. Due to the surface stress imbalance, an extended Stoney's formula for self-bending of ultrathin cantilevers is derived.
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