Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation

标题
Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 94, Issue 25, Pages 252905
出版商
AIP Publishing
发表日期
2009-06-27
DOI
10.1063/1.3159830

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