Interaction of La2O3 capping layers with HfO2 gate dielectrics

标题
Interaction of La2O3 capping layers with HfO2 gate dielectrics
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 95, Issue 21, Pages 212903
出版商
AIP Publishing
发表日期
2009-11-25
DOI
10.1063/1.3268456

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