期刊
APPLIED PHYSICS LETTERS
卷 93, 期 24, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3046098
关键词
focused ion beam technology; lithography; magnetic susceptibility; magnetic variables measurement; SQUID magnetometers
资金
- NSF [PHY-0425897, DMR-0507931, ECS-9731293]
- Division Of Physics
- Direct For Mathematical & Physical Scien [830228] Funding Source: National Science Foundation
Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300 nm from the sample. The 600 nm-2 mu m pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of similar to 70 electron spins per root hertz at 4 K.
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