Monocrystalline AlxGa1−xAs heterostructures for high-reflectivity high-Q micromechanical resonators in the megahertz regime

标题
Monocrystalline AlxGa1−xAs heterostructures for high-reflectivity high-Q micromechanical resonators in the megahertz regime
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 26, Pages 261108
出版商
AIP Publishing
发表日期
2008-07-11
DOI
10.1063/1.2952512

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