Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics

标题
Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 25, Pages 252910
出版商
AIP Publishing
发表日期
2008-06-28
DOI
10.1063/1.2953068

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