Electronic trap characterization of the Sc2O3∕La2O3 high-κ gate stack by scanning tunneling microscopy

标题
Electronic trap characterization of the Sc2O3∕La2O3 high-κ gate stack by scanning tunneling microscopy
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 2, Pages 022904
出版商
AIP Publishing
发表日期
2008-01-19
DOI
10.1063/1.2831907

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