Real-time observation of the dry oxidation of the Si(100) surface with ambient pressure x-ray photoelectron spectroscopy

标题
Real-time observation of the dry oxidation of the Si(100) surface with ambient pressure x-ray photoelectron spectroscopy
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 1, Pages 012110
出版商
AIP Publishing
发表日期
2008-01-04
DOI
10.1063/1.2830332

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