Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1−yOx thin films

标题
Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1−yOx thin films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 6, Pages 062903
出版商
AIP Publishing
发表日期
2008-08-16
DOI
10.1063/1.2971032

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