Moisture Permeation through Ultrathin TiO$_{2}$ Films Grown by Atomic Layer Deposition

标题
Moisture Permeation through Ultrathin TiO$_{2}$ Films Grown by Atomic Layer Deposition
作者
关键词
-
出版物
Applied Physics Express
Volume 5, Issue 3, Pages 035701
出版商
IOP Publishing
发表日期
2012-02-24
DOI
10.1143/apex.5.035701

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