Strain Distribution Analysis of Sputter-Formed Strained Si by Tip-Enhanced Raman Spectroscopy

标题
Strain Distribution Analysis of Sputter-Formed Strained Si by Tip-Enhanced Raman Spectroscopy
作者
关键词
-
出版物
Applied Physics Express
Volume 4, Issue 2, Pages 025701
出版商
IOP Publishing
发表日期
2011-01-14
DOI
10.1143/apex.4.025701

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