Impact of Surface Hydrophilicization prior to Atomic Layer Deposition for HfO2/Si Direct-Contact Gate Stacks

标题
Impact of Surface Hydrophilicization prior to Atomic Layer Deposition for HfO2/Si Direct-Contact Gate Stacks
作者
关键词
-
出版物
Applied Physics Express
Volume 2, Issue 1, Pages 011201
出版商
IOP Publishing
发表日期
2008-12-26
DOI
10.1143/apex.2.011201

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