期刊
APPLIED PHYSICS EXPRESS
卷 1, 期 8, 页码 -出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/APEX.1.085001
关键词
-
(100)/(001)-oriented tetragonal Pb(Zr,Ti)O-3 (PZT) films, which were thicker than 2 mu m, were epitaxially grown on SrRuO3-covered (100)Si, (100)KTaO3, (100)SrTiO3, and (100)CaF2 substrates by metal organic chemical vapor deposition. The volume fraction of the (001)orientation almost linearly increased as the thermal strain increased during the cooling process from the deposition temperature to the Curie temperature. Consequently, perfectly (001)-oriented, i.e., polar-axis-oriented, thick films were obtained on CaF2 substrates with a remanent polarization of 71 mu C/cm(2). This approach to grow polar-axis-oriented PZT thick films enabled the intrinsic piezoelectricity of PZT itself to be clarified, and has potential in novel applications. (C) 2008 The Japan Society of Applied Physics.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据