The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

标题
The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition
作者
关键词
Pattern Formation, Rutherford Backscattering Spectroscopy, Mixed Surface Layer, Silicide Phase, Silicide Formation
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 111, Issue 2, Pages 653-664
出版商
Springer Nature
发表日期
2012-10-02
DOI
10.1007/s00339-012-7285-8

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