期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 105, 期 3, 页码 517-528出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-011-6594-7
关键词
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资金
- Office of Naval Research (ONR)
This review discusses the origins and evolution of the MAPLE technique as it started as an alternative to spray coating of thin films for chemical vapor sensors. It describes its numerous applications for the deposition of thin films of polymeric, organic and biomaterials for various applications. This is followed by an overview of several new variations of the MAPLE technique. This review concludes with an outlook on the future of this highly versatile and successful vapor deposition process.
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