Optimization of PDMS network for a fast response and sensitive actuation material applied in a MEMS spatial light modulator

标题
Optimization of PDMS network for a fast response and sensitive actuation material applied in a MEMS spatial light modulator
作者
关键词
-
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 103, Issue 2, Pages 381-388
出版商
Springer Nature
发表日期
2011-03-16
DOI
10.1007/s00339-011-6348-6

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