Transient 3D/2D simulation of laser-induced ablation of silicon

标题
Transient 3D/2D simulation of laser-induced ablation of silicon
作者
关键词
-
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 92, Issue 4, Pages 987-991
出版商
Springer Nature
发表日期
2008-05-19
DOI
10.1007/s00339-008-4598-8

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