期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 93, 期 1, 页码 231-234出版社
SPRINGER
DOI: 10.1007/s00339-008-4653-5
关键词
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The ability to dynamically shape the spatial intensity profile of an incident laser beam enables new ways to modify and structure surfaces through pulsed laser processing. Here we describe a method to generate doughnut-shaped beams from an input Gaussian source using a tunable acoustic gradient index (TAG) lens. The TAG lens is capable of modulating between focused beams and annular rings of variable size, using sinusoidal driving frequencies. Laser micromachining is accomplished by synchronizing the TAG lens to a 355 nm pulsed nanosecond laser. Results in polyimide demonstrate the ability to generate adjacent surface features with different shapes and sizes.
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