Molecular dynamics study of groove fabrication process using AFM-based nanometric cutting technique

标题
Molecular dynamics study of groove fabrication process using AFM-based nanometric cutting technique
作者
关键词
-
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 94, Issue 3, Pages 593-600
出版商
Springer Nature
发表日期
2008-10-07
DOI
10.1007/s00339-008-4903-6

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