Nanolithography using high transmission nanoscale ridge aperture probe

标题
Nanolithography using high transmission nanoscale ridge aperture probe
作者
关键词
-
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 93, Issue 4, Pages 881-884
出版商
Springer Nature
发表日期
2008-06-26
DOI
10.1007/s00339-008-4752-3

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